Sample collection component and manufacturing method thereof

ABSTRACT

A sample collection component including a main body and a removable light shielding component is provided. The main body has a sample storing space which is sealable and allows light to pass through. The removable light shielding component is disposed on the main body and located outside the sample storing space for shielding at least a portion of the light passing through the sample storing space. In addition, a manufacturing method of the sample collection component is also provided.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the priority benefit of Taiwan applicationserial no. 104143103, filed on Dec. 22, 2015. The entirety of theabove-mentioned patent application is hereby incorporated by referenceherein and made a part of this specification.

BACKGROUND OF THE INVENTION

Field of the Invention

The invention relates to a sample collection component and amanufacturing method thereof, and more particularly relates to a samplecollection component having a light shielding component and amanufacturing method thereof.

Description of Related Art

With the advance in microscopy technology, various devices formicroscopic observation, such as atomic force microscope (AFM), electronmicroscope (e.g., transmission electron microscope (TEM) and scanningelectron microscope (SEM)), and so on, have been invented. Differenttypes of sample collection components are required for differentmicroscopes.

In terms of the current sample collection components, however, beforeand after a liquid sample is loaded into the sample storing space of thesample collection component, irradiation of external light may provideenergy to the liquid sample or cause the temperature of the liquidsample to change. As a result, fluidity of the liquid sample may change,the components of the liquid sample may react with each other, or thesample composition may even deteriorate, and affect the finalobservation result of the display device.

SUMMARY OF THE INVENTION

The invention provides a sample collection component, which efficientlyshields light before and after a liquid sample is loaded into the samplecollection component.

The invention provides a manufacturing method of a sample collectioncomponent, by which a removable light shielding component is furtherdisposed on a main body of the sample collection component to shield atleast a portion of the light that passes through a storing space of thesample collection component.

The invention provides a manufacturing method for manufacturing a samplecollection component that includes a removable light shielding componentfor shielding at least a portion of the light that passes through astoring space of the sample collection component.

A sample collection component of the invention includes a main body anda removable light shielding component. The main body has a samplestoring space that is sealable and allows light to pass through. Theremovable light shielding component is disposed on the main body andlocated outside the sample storing space for shielding at least aportion of the light that passes through the sample storing space.

A manufacturing method of a sample collection component of the inventionincludes bonding a first substrate to a second substrate, and forming aspacer between the first substrate and the second substrate to connectand fix the first substrate and the second substrate, so as to form asample storing space, which is sealable and allows light to passthrough, between the first substrate and the second substrate. Aremovable light shielding component is formed on the first substrate.The removable light shielding component corresponds to the samplestoring space for shielding at least a portion of the light that passesthrough the sample storing space.

A manufacturing method of a sample collection component of the inventionincludes providing a first substrate. A removable light shieldingcomponent is formed on the first substrate in the process ofmanufacturing the first substrate. The first substrate is bonded to asecond substrate. A spacer is formed between the first substrate and thesecond substrate to connect and fix the first substrate and the secondsubstrate, so as to form a sample storing space that is sealable andallows light to pass through between the first substrate and the secondsubstrate. The removable light shielding component corresponds to thesample storing space for shielding at least a portion of the light thatpasses through the sample storing space.

According to an embodiment of the invention, the removable lightshielding component includes a sheet material. The sheet material isattached onto the main body and covers at least a portion of the samplestoring space.

According to an embodiment of the invention, the main body includes arecess corresponding to the sample storing space, for forming anobservation window that exposes the sample storing space. The sheetmaterial seals the recess to form a sealed space of a particularpressure in the recess.

According to an embodiment of the invention, the removable lightshielding component includes a material layer. The material layer coversa surface of the main body and at least a portion of the sample storingspace.

According to an embodiment of the invention, the removable lightshielding component includes a structural member that is manufacturedsimultaneously with the main body. The structural member is connectedwith the main body by a connection part.

According to an embodiment of the invention, the main body includes arecess corresponding to the sample storing space for forming anobservation window that exposes the sample storing space. The removablelight shielding component includes a material layer that is located on abottom surface of the observation window and extends to a portion of ajunction between the sample storing space and the main body.

According to an embodiment of the invention, the main body includes afirst substrate, a second substrate, and a spacer. The first substratehas a first surface and a second surface opposite to each other. Thesecond substrate has a third surface and a fourth surface opposite toeach other. The first substrate and the second substrate are stacked oneach other and the second surface faces the third surface. The spacer isdisposed between the second surface and the third surface and connectsand fixes the first substrate and the second substrate to form thesample storing space between the first substrate and the secondsubstrate.

According to an embodiment of the invention, the main body furtherincludes a first thin film and a second thin film. The first thin filmis located on the second surface of the first substrate. The second thinfilm is located on the third surface of the second substrate. The firstthin film, the second thin film, and the spacer together surround thesample storing space.

According to an embodiment of the invention, the first substrateincludes a first recess located on the first surface and a bottom of thefirst recess is connected with the first thin film to form anobservation window that exposes the sample storing space. The removablelight shielding component includes a material layer. The material layeris located on a bottom surface of the observation window and extends toa portion of a junction between the sample storing space and the mainbody.

According to an embodiment of the invention, the second substrateincludes a second recess located on the fourth surface. A bottom of thesecond recess is connected with the second thin film to form a secondobservation window that exposes the sample storing space.

According to an embodiment of the invention, the removable lightshielding component includes a light filtering material or a light valvecomponent.

According to an embodiment of the invention, a material of the removablelight shielding component is a conductor of gold, copper, or aluminum,or a semiconductor of silicon or a non-conductor of plastic, ceramics,or a polymer material.

According to an embodiment of the invention, the light filteringmaterial filters a light having a wavelength of 100 nm to 1 mm.

According to an embodiment of the invention, a method of forming theremovable light shielding component includes attaching a sheet materialonto the first substrate. The sheet material covers at least a portionof the sample storing space.

According to an embodiment of the invention, a material of the sheetmaterial is a conductor of gold, copper, or aluminum, or a semiconductorof silicon, or a non-conductor of plastic, ceramics, or a polymermaterial.

According to an embodiment of the invention, the manufacturing method ofthe sample collection component further includes forming a recess on afirst surface of the first substrate corresponding to the sample storingspace for Ruining an observation window that exposes the sample storingspace. The sheet material seals the recess to form a sealed space of aparticular pressure in the recess.

According to an embodiment of the invention, a method of attaching thesheet material onto the first substrate includes attaching the sheetmaterial onto the first substrate by bonding, clamping, or electrostaticadsorption from outside of the first substrate.

According to an embodiment of the invention, a method of forming theremovable light shielding component includes Raining a material layer onthe first surface of the first substrate. The sheet material covers atleast a portion of the sample storing space.

According to an embodiment of the invention, a method of forming thematerial layer on the first substrate includes applying the materiallayer onto the first substrate by vapor deposition, sputtering, orcoating.

According to an embodiment of the invention, the removable lightshielding component includes a structural member that is manufacturedsimultaneously with the first substrate, and the structural member isconnected with the first substrate by a connection part.

According to an embodiment of the invention, the manufacturing method ofthe sample collection component further includes forming a recess on afirst surface of the first substrate corresponding to the sample storingspace for forming an observation window that exposes the sample storingspace. The removable light shielding component includes a materiallayer. The material layer is located on a bottom surface of theobservation window and extends to a portion of a junction between thesample storing space and the first substrate.

Based on the above, the sample collection component of the inventionshields and filters at least a portion of the light, which enters thesample storing space through the main body, with the removable lightshielding component. Therefore, before and after the liquid sample isloaded into the sample storing space of the sample collection component,the removable light shielding component shields the light and preventsthe fluidity or component properties of the liquid sample from beingchanged due to reaction between the components of the liquid sample andthe incident light, which may affect the subsequent observation result.

To make the aforementioned and other features and advantages of theinvention more comprehensible, several embodiments accompanied withdrawings are described in detail as follows.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the invention, and are incorporated in and constitute apart of this specification. The drawings illustrate exemplaryembodiments of the invention and, together with the description, serveto explain the principles of the invention.

FIG. 1A is a schematic view of the sample collection component accordingto an embodiment of the invention.

FIG. 1B is a schematic cross-sectional view of the sample collectioncomponent of FIG. 1A along the plane A-A′.

FIG. 2 is a schematic view of the sample collection component accordingto another embodiment of the invention.

FIG. 3 is a schematic view of the sample collection component accordingto another embodiment of the invention.

FIG. 4A and FIG. 4B are schematic views of the sample collectioncomponent according to another embodiment of the invention.

FIG. 5A and FIG. 5B are schematic views of the sample collectioncomponent according to another embodiment of the invention.

FIG. 6A is a schematic view of the sample collection component accordingto another embodiment of the invention.

FIG. 6B is a schematic view of the sample collection component accordingto another embodiment of the invention.

FIG. 7A, FIG. 7B, and FIG. 7C are schematic views of the samplecollection component according to another embodiment of the invention.

FIG. 8A, FIG. 8B, and FIG. 8C are schematic views of the samplecollection component according to another embodiment of the invention.

FIG. 9 is a schematic view of the sample collection component accordingto another embodiment of the invention.

FIG. 10A is a flowchart showing the manufacturing method of the samplecollection component according to an embodiment of the invention.

FIG. 10B is a flowchart showing the manufacturing method of the samplecollection component according to another embodiment of the invention.

FIG. 11A is a flowchart showing the manufacturing method of the samplecollection component according to another embodiment of the invention.

FIG. 11B is a flowchart showing the manufacturing method of the samplecollection component according to another embodiment of the invention.

DESCRIPTION OF THE EMBODIMENTS

FIG. 1A is a schematic view of a sample collection component accordingto an embodiment of the invention. FIG. 1B is a schematiccross-sectional view of the sample collection component of FIG. 1A alongthe plane A-N. A sample collection component 100 includes a main body110 and a removable light shielding component 120. In this embodiment,the main body 110 has a sample storing space 130 that is sealable. Thesample storing space 130 allows light to pass through. Moreover, aremovable light shielding component 120 is disposed on the main body 110and located outside the sample storing space 130.

In this embodiment, the removable light shielding component 120 is asheet material, for example, which is attached onto the main body 110 tocover a portion of the sample storing space 130. The sheet material maybe formed of a conductive material, such as gold, copper, and aluminum.Alternatively, the sheet material may be formed of silicon, plastic,ceramics, a polymer conductor, or a semiconductor material. For example,the removable light shielding component 120 may be a copper foil, whichmay be attached to a surface 111 of the main body 110 by bonding,clamping, or electrostatic adsorption. Moreover, in this embodiment, theremovable light shielding component 120 may be a material layer composedof a metal, such as gold and aluminum, which is formed by sputtering,vapor deposition, or spin coating and covers the surface 111 of the mainbody 110 and a portion of the sample storing space 130.

The removable light shielding component 120 may include a lightfiltering component formed of an organic material and a metal material,or a light valve component formed of a liquid crystal material, forexample. The removable light shielding component 120 may shield aportion of the light that enters the main body 110 by filtering,absorbing, or reflecting the light. If the removable light shieldingcomponent 120 is formed of a light filtering material, the lightshielded by the removable light shielding component 120 has a wavelengththat ranges from 100 nm to 1 mm, i.e., a range between UVC and LWIR, forexample.

In this embodiment, the main body 110 of the sample collection component100 is provided with the removable light shielding component 120thereon. Therefore, before and after a liquid sample to be observed isloaded into the sample storing space 130, the removable light shieldingcomponent 120 is temporarily fixed to cover the main body 110 to preventa visible light, such as ultraviolet light, or an invisible light, suchas infrared light, from passing through the main body 110 of the samplecollection component 100 and irradiating the sample storing space 130and causing components of the liquid sample to react or change inproperty due to the light irradiation. Moreover, after the loading ofthe liquid sample is completed, the removable light shielding component120 may be removed to facilitate observation of the sample performed byusing a microscope device, such as an electron microscope. In addition,in this embodiment, a thin film 118 may be further disposed in aperiphery of the sample storing space 130 to serve as a surface ofcontact between the sample storing space 130 and the liquid sample, soas to enhance flow or adsorption of the liquid sample in the samplestoring space 130.

In this embodiment, after the loading of the liquid sample into thesample storing space 130 is completed, the removable light shieldingcomponent 120 may be removed by a physical method, such as applying anexternal force, current, or electric field, and changing thetemperature, or by a chemical method, such as dissolution, etching, orother chemical reactions, according to different composition structures,materials, and forming methods.

FIG. 2 is a schematic view of the sample collection component accordingto another embodiment of the invention. A sample collection component200 of this embodiment has a structure similar to the structure of thesample collection component 100 of the previous embodiment. Therefore,identical or similar components are assigned with the same or similarreference numerals, and detailed description thereof is not repeatedhereinafter. In this embodiment, the main body 110 of the samplecollection component 200 may further has a recess corresponding to thesample storing space 130 for forming an observation window 213 thatexposes the sample storing space 130. Moreover, in this embodiment, thesample collection component 200 includes a removable light shieldingcomponent 220, which may be a sheet material. The sheet material is usedto seal the recess where the observation window 213 is formed, so as toform a sealed space of a particular pressure in the recess. The pressureis in a range of about 0.01 KPa to 150 KPa. For example, the pressure ofthe sealed space may be smaller than or greater than an externalpressure, such that the removable light shielding component 220 is moresecurely attached to the surface 111 of the main body 110 due to thedifference between the internal and external pressures, so as to form anairtight space in the sealed space.

FIG. 3 is a schematic view of the sample collection component accordingto another embodiment of the invention. A sample collection component300 of this embodiment has a structure similar to the structure of thesample collection component 200 of the embodiment of FIG. 2. Therefore,identical or similar components are assigned with the same or similarreference numerals, and detailed description thereof is not repeatedhereinafter. A difference between the sample collection component 300 ofthis embodiment and the sample collection component 200 of the previousembodiment is that: a removable light shielding component 320 of thisembodiment is a metal material layer, such as gold and aluminum, formingby sputtering, vapor deposition, or spin coating, for example. As shownin FIG. 3, the removable light shielding component 320 may be disposedon a bottom surface of the observation window 213 and extend to aportion of a junction between the sample storing space 130 and the mainbody 110.

FIG. 4A and FIG. 4B are schematic views of the sample collectioncomponent according to another embodiment of the invention. Referring toFIG. 4A and FIG. 4B, a sample collection component 400 of thisembodiment has a structure similar to the structure of the samplecollection component 200 of FIG. 2. Therefore, identical or similarcomponents are assigned with the same or similar reference numerals, anddetailed description thereof is not repeated hereinafter. A differencebetween the sample collection component 400 of this embodiment and thesample collection component 300 of the previous embodiment is that: aremovable light shielding component 420 of this embodiment is a lightshielding structural member that is manufactured and completed at thesame time as the main body 110, and the removable light shieldingcomponent 420 is connected with the main body 110 through a connectionpart 421. In other words, the sample collection component 400 alreadyincludes the removable light shielding component 420 when beingcompleted. It is not required to additionally attach or deposit a lightshielding structure onto the sample collection component 400. In thisembodiment, the removable light shielding component 420 is a siliconstructure, for example, or may be formed through a characteristic changeof a construction material of the main body 110. For example, if themain body 110 includes a liquid crystal material, the liquid crystalmaterial may change the light shielding effect by an electric field, soas to form the removable light shielding component 420 for shieldinglight. As shown in FIG. 4B, in this embodiment, after the loading of theliquid sample into the sample storing space 130 is completed, theremovable light shielding component 420 is removed by an external forceP, for example, so as to facilitate the subsequent sample observationperformed by using a microscope device.

FIG. 5A and FIG. 5B are schematic views of the sample collectioncomponent according to another embodiment of the invention. Referring toFIG. 5A, in the sample collection component 400 of this embodiment, theremovable light shielding component 425, formed of SiC for example, maybe disposed corresponding to the sample storing space 130 directly byvapor deposition, sputtering, or spin coating simultaneously when themain body 110 is manufactured. In addition, the sample storing space 130may be covered by a thin film 418 formed of silicon nitride, forexample, which serves as an etch stop layer of the sample storing space130 and forms the surface of contact between the sample storing space130 and the liquid sample. Referring to FIG. 5B, after the loading ofthe liquid sample into the sample storing space 130 is completed, aportion of the removable light shielding component 425 that shieldsabove the sample storing space 130 may be removed by plasma dry etchingin the direction indicated by the arrow of FIG. 5B for performing thesubsequent sample observation step.

FIG. 6A is a schematic view of the sample collection component accordingto another embodiment of the invention. Referring to FIG. 6A, a samplecollection component 500 of this embodiment has a structure similar tothe structure of the sample collection component 200 of the embodimentof FIG. 1A and FIG. 1B. Therefore, identical or similar components areassigned with the same or similar reference numerals, and detaileddescription thereof is not repeated hereinafter. In this embodiment, adifference between the sample collection component 500 and the samplecollection component 200 is that: a main body 510 of the samplecollection component 500 may include a first substrate 512, a secondsubstrate 514, and a spacer 516. The first substrate 512 has a firstsurface 512 a and a second surface 512 b opposite to each other, and thesecond substrate 514 has a third surface 514 a and a fourth surface 514b opposite to each other. Moreover, the first substrate 512 and thesecond substrate 514 are stacked on each other vertically, for example,and the second surface 512 b of the first substrate 512 faces the thirdsurface 514 a of the second substrate 514.

In this embodiment, a material of the first substrate 512 and the secondsubstrate 514 is a semiconductor material or a metal oxide material, forexample. In addition, the semiconductor material is a double polished orsingle polished single crystal silicon, and the metal oxide is aluminumoxide, for example. The thicknesses of the first substrate 512 and thesecond substrate 514 may be changed according to the design or actualneeds. For example, if the sample collection component 500 is appliedfor observation using an electron microscope, the thicknesses of thefirst substrate 512 and the second substrate 514 may be designedrespectively to be in a range of about 0.2 mm to 0.8 mm.

As shown in FIG. 6A, the spacer 516 is disposed between the secondsurface 512 b and the third surface 514 a to connect and fix the firstsubstrate 512 and the second substrate 514 and form a sample storingspace 530 between the first substrate 512 and the second substrate 514.In this embodiment, the sample storing space 530 defined by the spacer516 may be a flow channel that has openings at the front and rear ends.The liquid sample may enter the sample storing space 530 through theopenings at the front and rear ends to be contained in the samplestoring space 530.

In this embodiment, the spacer 516 may also maintain a distance betweenthe first substrate 512 and the second substrate 514 and bond and fixthe first substrate 512 and the second substrate 514. The spacer 516 hasa height in a range of about 0.1 μm to 20 μm, or even in a range of 0.1μm to 10 μm. In other words, the distance between the first substrate512 and the second substrate 514, i.e., the height of the sample storingspace 530, is in a range of 0.1 μm to 20 μm, or even in a range of 0.1μm to 10 μm. The manufacturing and configuration method of thisembodiment as described above has an advantage that: if the liquidsample contains suspended particles, some suspended particles that aregreater than 10 μm in the liquid sample may be excluded from the samplestoring space 530. Thus, the sample collection component 500 of thisembodiment may be used for performing separation observation for bloodcells and plasma in blood.

In this embodiment, considering the materials, manufacturing processes,and other possible factors of the first substrate 512 and the secondsubstrate 514, the spacer 516 may be an adhesive material, such as epoxyresin, an ultraviolet glue, or a silicone material. Alternatively, thespacer 516 may be a non-adhesive material, such as silicon or an oxidethereof. Furthermore, the spacer 516 may be bonded between the firstsubstrate 512 and the second substrate 514 by anodic bonding betweensilicon or a silicon oxide, for example. Moreover, the spacer 516 may beapplied by screen printing and seal, for example, to be formed on thesecond surface 512 b of the first substrate 512 and the third surface514 a of the second substrate 514. Alternatively, in the samplecollection component 500, the spacer 516 may be formed on the secondsurface 512 b of the first substrate 512 and the third surface 514 a ofthe second substrate 514 by chemical vapor deposition.

In this embodiment, the main body 510 may have a first thin film 518 aand a second thin film 518 b, wherein the first thin film 518 a islocated on the second surface 512 b of the first substrate 512 and thesecond thin film 518 b is located on the third surface 514 a of thesecond substrate 514. The first thin film 518 a, the second thin film518 b, and the spacer 516 together maintain the sample storing space530. In this embodiment, a method of forming the first thin film 518 aand the second thin film 518 b respectively on the second surface 512 band the third surface 514 a includes chemical vapor deposition, acidwashing, surface material deposition, and polymer deposition, whereinthe chemical deposition method is performed by plasma enhanced chemicalvapor deposition (PECVD), for example. Details regarding the method offorming the first thin film 518 a and the second thin film 518 b may beknown from the current semiconductor manufacturing or MEMS(microelectromechanical) manufacturing technology and thus are notexplained hereinafter.

A material of the first thin film 518 a and the second material 518 bmay be selected from a group of silicon, silicon nitride, silicon oxide,silicon dioxide, silicon oxynitride, carbon, diamond film, siliconcarbide, graphene, silicon carbide, aluminum oxide, titanium nitride,carbon oxide, and a combination thereof. In addition, the first thinfilm 518 a and the second thin film 518 b need to use a material thathas a high electron penetration rate for an electron beam from atransmission electron microscope, for example, to pass through, so as tomeet the observation requirement of the transmission electronmicroscope. Furthermore, the thicknesses of the first thin film 518 aand the second thin film 518 b may be changed according to the design oractual needs. For example, the first thin film 518 a and the second thinfilm 518 b respectively have a thickness that is in a range of about 2nm to 200 nm, so as to facilitate the observation through a microscopedevice, such as transmission electron microscope. The above describes asilicon wafer manufacturing process as an example. Nevertheless, theinvention may also be applied to other substrate materials consideringthe mechanical strength, density, light transmittance, electronpenetration rate, process integration of the thin film and thesubstrate, residual stress, and surface properties of the thin film.

Furthermore, the first thin film 518 a and the second thin film 518 b ofthis embodiment may serve as the surface for contact with the liquidsample, which may be a hydrophilic material or a hydrophobic material.In this embodiment, the hydrophilic material may enhance the adsorptionstrength for adsorbing polar liquid sample. The hydrophobic material mayenhance the adsorption strength for adsorbing non-polar liquid sample.In addition, the surface properties of the first thin film 518 a and thesecond thin film 518 b may be physically modified through UV ozonemodification or plasma modification, or be chemically modified bypickling, etching, anodizing, or connecting a functional group, forexample.

In this embodiment, the removable light shielding component 520 coversthe first surface 512 a of the first substrate 512, and the removablelight shielding component 520 may be a sheet material or a materiallayer formed by sputtering, vapor deposition, or spin coating. Moreover,a material for forming the removable light shielding component 520 mayinclude a conductive material, such as gold, copper, and aluminum, or asemiconductor or non-conductive material, such as silicon, plastic,ceramics, or a polymer material.

FIG. 6B is a schematic view of the sample collection component accordingto another embodiment of the invention. Referring to FIG. 6A and FIG.6B, in addition to using the removable light shielding component 520 tocover the first surface 512 a of the first substrate 512 of the samplecollection component 500 as shown in FIG. 6A, in this embodiment, thefourth surface 514 b of the second substrate 514 of the samplecollection component 500 may also be covered with the removable lightshielding component 520 to enhance the light shielding effect of thesample collection component 500.

FIG. 7A, FIG. 7B, and FIG. 7C are schematic views of the samplecollection component according to another embodiment of the invention.Referring to FIG. 7A, a sample collection component 600 of thisembodiment has a structure similar to the structure of the samplecollection component 500 of the embodiment of FIG. 6. Therefore,identical or similar components are assigned with the same or similarreference numerals, and detailed description thereof is not repeatedhereinafter. A difference between the sample collection component 600 ofthis embodiment and the sample collection component 500 includes that: afirst substrate 612 of a main body 610 of the sample collectioncomponent 600 includes a first recess on a second surface 612 b to forma first observation window 613 a that exposes the sample storing space530, and a bottom of the first observation window 613 a is connectedwith the first thin film 518 a. Moreover, the removable light shieldingcomponent 520 may cover the first observation window 613 a to form asealed space in the first recess that forms the first observation window613 a.

Referring to FIG. 7B and FIG. 7C, in this embodiment, in addition toforming the removable light shielding component 520 with the sheetmaterial or the material layer described above, removable lightshielding components 620 and 625 may be manufactured simultaneously withthe main body 610 of the sample collection component 600, as shown inFIG. 7B or FIG. 7C, to shield the light that enters the sample storingspace 630 according to the actual needs. Referring to FIG. 7B, theremovable light shielding component 620 has composition material andstructure similar to those of the aforementioned removable lightshielding component 420, and the removable light shielding component 620may be manufactured simultaneously with the first substrate 612 of themain body 610 when the sample collection component 600 is manufactured,wherein the removable light shielding component 620 is connected withthe first surface 612 a of the first substrate 612 through a connectionpart 621. Moreover, after the loading of the liquid sample into thesample storing space 130 is completed, the removable light shieldingcomponent 620 may be removed by an external force, as shown in FIG. 4B.

Referring to FIG. 7C, in the sample collection component 600 of thisembodiment, during the manufacturing process of the first substrate 612of the main body 610, a removable light shielding component 625 that isformed of a SiC material for example may be applied to the secondsurface 612 b of the first substrate corresponding to the sample storingspace 530 to form the material layer for shielding the light. Theremovable light shielding component 625 of this embodiment has structureand composition material similar to those of the removable lightshielding component 425. Moreover, after the loading of the liquidsample into the sample storing space 630 of the sample collectioncomponent 600 is completed, the removable light shielding component 625may also be removed by plasma dry etching.

Referring to FIG. 7A, the second substrate 614 includes a second recesson the third surface 614 a to font′ a second observation window 613 bthat exposes the sample storing space 530, and a bottom of the secondrecess is connected with the second thin film 518 b. In this embodiment,the sample collection component 600 is placed on a working platform bythe fourth surface 614 b of the second substrate 614, for example.Therefore, a side of the fourth surface 614 b of the second substrate614 is shielded by the working platform directly and does not require alight shielding structure. In other embodiments not illustrated here,the sample collection component 600 may be placed on the workingplatform by the first surface 612 a of the first substrate 612, and theremovable light shielding component 520 may be disposed on the fourthsurface 614 b of the second substrate 614 instead.

FIG. 8A, FIG. 8B, and FIG. 8C are schematic views of the samplecollection component according to another embodiment of the invention.As shown in FIG. 8A, FIG. 8B, and FIG. 8C, in addition to the samplecollection component 600 shown in FIG. 7A, FIG. 7B, and FIG. 7C, theremovable light shielding component 520, 620, or 625 may be furtherdisposed on the first surface 612 a of the first substrate 612. In thisembodiment, the removable light shielding component 520, 620, or 625 mayalso be disposed on the fourth surface 614 b of the second substrate 614of the sample collection component 600, so as to shield light for thefirst observation window 613 a and the second observation window 613 bof the sample collection component 600.

In particular, if the sample collection component 600 is not placed onthe working platform, such as desktop, light may enter the samplestoring space 530 through the second observation window 613 b formed inthe second substrate 614. Therefore, by disposing the removable lightshielding component 520, 620, or 625 on both the first surface 612 a ofthe first substrate 612 and the fourth surface 614 b of the secondsubstrate 614, light leakage is prevented and the light shielding effectfor the sample storing space 530 is enhanced.

FIG. 9 is a schematic view of the sample collection component accordingto another embodiment of the invention. A sample collection component700 of this embodiment has a structure similar to the structure of thesample collection component 600 of FIG. 7A, FIG. 7B, and FIG. 7C.Therefore, identical or similar components are assigned with the same orsimilar reference numerals, and detailed description thereof is notrepeated hereinafter. In this embodiment, grooves 715 a and 715 b may beformed respectively on the second surface 712 b of the first substrate712 and the third surface 714 a of the second substrate 714 of thesample collection component 700 corresponding to the sample storingspace 530. In the sample collection component 700, the amount of theliquid sample that can be stored in the sample storing space 530 isadjustable by changing the sizes of the grooves 715 a and 715 b.

Moreover, the sample collection component 700 may be similar to thesample collection component 500 and further have the removable lightshielding component 520 on the main body 710. Alternatively, the samplecollection component 700 may be similar to the sample collectioncomponent 600, in which the removable light shielding component 620 or625 is formed simultaneously when the main body 710 is manufactured.

FIG. 10A is a flowchart showing the manufacturing method of the samplecollection component according to an embodiment of the invention.Referring to FIG. 7A and FIG. 10A, in this embodiment, the manufacturingmethod of the sample collection component 500 includes: bonding thefirst substrate 612 to the second substrate 614, and forming the spacer516 between the first substrate 612 and the second substrate 614 (StepS801) to connect and fix the first substrate 612 and the secondsubstrate 614, so as to form the sample storing space 530, which issealable and allows light to pass through, between the first substrate612 and the second substrate 614. Then, the removable light shieldingcomponent 520 is formed on the first substrate 512 (Step S802). Theremovable light shielding component 520 corresponds to the samplestoring space 530 and shields at least a portion of the light thatpasses through the sample storing space 530.

In this embodiment, the removable light shielding component 520 is asheet material, for example, which is attached onto the first substrate612 by external overlap, clamping, or electrostatic adsorption.Alternatively, the removable light shielding component 520 may be amaterial layer formed on the first substrate 612 by vapor deposition,sputtering, or coating. The sample collection component 500 shields atleast a portion of the light that enters the sample storing space 530with the removable light shielding component 520.

Referring to FIG. 7A again, in this embodiment, like the aforementionedsample collection component 600, the sample collection component 500 mayfurther have the first recess formed on the first surface 612 a of thefirst substrate 612 corresponding to the sample storing space 530, so asto form the first observation window 613 a that exposes the samplestoring space 530. In addition, the first observation window 613 a maybe temporarily covered by the removable light shielding component 520,which is formed of a sheet material for example, so as to form a sealedspace of a particular pressure in the first observation window 613 a.The pressure is in a range of 0.01 KPa to 150 KPa, for example, toenhance the stability of the sheet material attached onto the firstsurface 612 a.

FIG. 10B is a flowchart showing the manufacturing method of the samplecollection component according to an embodiment of the invention.Referring to FIG. 8A and FIG. 10B, in the manufacturing process of thesample collection component 600, after the bonding of the firstsubstrate 612 to the second substrate 614 is completed and the spacer516 is formed between the first substrate 612 and the second substrate614 (Step S901), in addition to forming the removable light shieldingcomponent 520 on the first substrate 612 of the sample collectioncomponent 600 as shown in FIG. 10A, in this embodiment, the removablelight shielding component 520 may be simultaneously formed on the secondsubstrate 614 of the sample collection component 600 (Step S902), so asto provide the light shielding effect for both the first observationwindow 613 a and the second observation window 613 b of the samplecollection component 600 and enhance the light shielding effect of thesample storing space 530.

FIG. 11A is a flowchart showing the manufacturing method of the samplecollection component according to another embodiment of the invention.Referring to FIG. 7C and FIG. 11A, in this embodiment, the manufacturingmethod of the sample collection component 600 includes providing thefirst substrate 612, and the removable light shielding component 625 isformed on the first substrate 612 in the process of manufacturing thefirst substrate 612 (Step S1001). Then, the first substrate 612 isbonded to the second substrate 614 and the spacer 516 is formed betweenthe first substrate 612 and the second substrate 614 (Step S1002) toform the sample storing space 530 that is sealable and allows light topass through between the first substrate 612 and the second substrate614. In this embodiment, the removable light shielding component 625 isdisposed corresponding to the sample storing space 530 to shield atleast a portion of the light that passes through the sample storingspace 530.

As described above, the first surface 612 a of the first substrate 612in this embodiment may be formed with the first recess corresponding tothe sample storing space 530, so as to form the first observation window613 a that exposes the sample storing space 530. Moreover, the removablelight shielding component 625 of this embodiment may be a material layerformed of SiC, which is disposed on the bottom surface of the firstobservation window 613 a and extends to a portion of a junction betweenthe sample storing space 530 and the first substrate 612.

In this embodiment, in the manufacturing method of the sample collectioncomponent 600, the removable light shielding component 620 may be usedas the light shielding structure, as shown in FIG. 7B. As describedabove, the removable light shielding component 620 is a structuralmember formed simultaneously with the first substrate 612, and theremovable light shielding component 620 may be connected with the firstsubstrate 612 through the connection part 621 to shield at least aportion of the light that passes through the sample storing space 530.

FIG. 11B is a flowchart showing the manufacturing method of the samplecollection component according to an embodiment of the invention.Referring to FIG. 8C and FIG. 11B, in the manufacturing method of thesample collection component 600 in this embodiment, in addition toforming the removable light shielding component 625 on the firstsubstrate 612 in the step of manufacturing the first substrate 612 asshown in FIG. 11A, the removable light shielding component 520 may beformed on the second substrate 614 while the second substrate 614 ismanufactured (Step S1101). Then, the first substrate 612 and the secondsubstrate 614 respectively having the removable light shieldingcomponent 520 formed on the surfaces thereof are bonded to each other,and the spacer 516 is formed between the first substrate 612 and thesecond substrate 614 (Step S1102).

To sum up, the sample collection component disclosed in the aboveembodiments of the invention is provided with the removable lightshielding component to shield at least a portion of the light thatpasses through the sample storing space. Before the liquid sample isloaded into the sample storing space, the removable light shieldingcomponent prevents unnecessary light from entering the sample storingspace through the main body of the sample collection component byfiltering, reflecting, or absorbing the light. Therefore, beforeobservation is performed with a microscope device, such as an electronmicroscope, the removable light shielding component prevents thefluidity or component properties of the liquid sample from being changeddue to irradiation of external light or reaction between the componentsof the liquid sample and the light, which may affect the observationresult.

It will be apparent to those skilled in the art that variousmodifications and variations can be made to the disclosed embodimentswithout departing from the scope or spirit of the invention. In view ofthe foregoing, it is intended that the invention covers modificationsand variations provided that they fall within the scope of the followingclaims and their equivalents.

What is claimed is:
 1. A sample collection component, comprising: a mainbody having a sample storing space which is sealable and allows a lightto pass through; and a removable light shielding component disposed onthe main body and located outside the sample storing space for shieldingat least a portion of the light that passes through the sample storingspace.
 2. The sample collection component according to claim 1, whereinthe removable light shielding component comprises a sheet material thatis attached onto the main body and covers at least a portion of thesample storing space.
 3. The sample collection component according toclaim 2, wherein the main body comprises a recess corresponding to thesample storing space for forming an observation window that exposes thesample storing space, and the sheet material seals the recess to form asealed space of a particular pressure in the recess.
 4. The samplecollection component according to claim 1, wherein the removable lightshielding component comprises a material layer that covers a surface ofthe main body and at least a portion of the sample storing space.
 5. Thesample collection component according to claim 1, wherein the removablelight shielding component comprises a structural member that ismanufactured simultaneously with the main body, and the structuralmember is connected with the main body by a connection part.
 6. Thesample collection component according to claim 1, wherein the main bodycomprises a recess corresponding to the sample storing space for formingan observation window that exposes the sample storing space, and theremovable light shielding component comprises a material layer that islocated on a bottom surface of the observation window and extends to aportion of a junction between the sample storing space and the mainbody.
 7. The sample collection component according to claim 1, whereinthe main body comprises: a first substrate having a first surface and asecond surface opposite to each other; a second substrate having a thirdsurface and a fourth surface opposite to each other, wherein the firstsubstrate and the second substrate are stacked on each other and thesecond surface faces the third surface; and a spacer disposed betweenthe second surface and the third surface and connecting and fixing thefirst substrate and the second substrate to form the sample storingspace between the first substrate and the second substrate.
 8. Thesample collection component according to claim 7, wherein the main bodyfurther comprises: a first thin film located on the second surface ofthe first substrate; and a second thin film located on the third surfaceof the second substrate, wherein the first thin film, the second thinfilm, and the spacer together surround the sample storing space.
 9. Thesample collection component according to claim 8, wherein the firstsubstrate comprises a first recess located on the first surface and abottom of the first recess is connected with the first thin film to forma first observation window that exposes the sample storing space, andthe removable light shielding component is disposed on the firstobservation window to shield at least a portion of the light that passesthrough the sample storing space.
 10. The sample collection componentaccording to claim 9, wherein the second substrate comprises a secondrecess located on the fourth surface and a bottom of the second recessis connected with the second thin film to form a second observationwindow that exposes the sample storing space.
 11. The sample collectioncomponent according to claim 1, wherein the removable light shieldingcomponent comprises a light filtering material or a light valvecomponent.
 12. The sample collection component according to claim 1,wherein a material of the removable light shielding component comprisesa conductor of gold, copper, or aluminum, or a semiconductor of silicon,or a non-conductor of plastic, ceramics, or a polymer material.
 13. Thesample collection component according to claim 1, wherein the lightfiltering material filters a light having a wavelength of 100 nm to 1mm.
 14. A manufacturing method of a sample collection component,comprising: bonding a first substrate to a second substrate and forminga spacer between the first substrate and the second substrate to connectand fix the first substrate and the second substrate, so as to form asample storing space that is sealable and allows a light to pass throughbetween the first substrate and the second substrate; and forming aremovable light shielding component on the first substrate correspondingto the sample storing space to shield at least a portion of the lightthat passes through the sample storing space.
 15. The manufacturingmethod according to claim 14, wherein a method of forming the removablelight shielding component comprises attaching a sheet material onto thefirst substrate, and the sheet material covers at least a portion of thesample storing space.
 16. The manufacturing method according to claim15, further comprising forming a recess on a first surface of the firstsubstrate corresponding to the sample storing space for forming anobservation window that exposes the sample storing space, wherein thesheet material seals the recess to form a sealed space of a particularpressure in the recess.
 17. The manufacturing method according to claim15, wherein a method of attaching the sheet material onto the firstsubstrate comprises attaching the sheet material onto the firstsubstrate by bonding, clamping, or electrostatic adsorption from outsideof the first substrate.
 18. The manufacturing method according to claim15, wherein a material of the sheet material comprises a conductor ofgold, copper, or aluminum, or a semiconductor of silicon, or anon-conductor of plastic, ceramics, or a polymer material.
 19. Themanufacturing method according to claim 14, wherein a method of formingthe removable light shielding component comprises forming a materiallayer on the first surface of the first substrate, and the sheetmaterial covers at least a portion of the sample storing space.
 20. Themanufacturing method according to claim 19, wherein a method of formingthe material layer on the first substrate comprises applying thematerial layer onto the first substrate by vapor deposition, sputtering,or coating.
 21. A manufacturing method of a sample collection component,comprising: providing a first substrate, wherein a removable lightshielding component is formed on the first substrate in a process ofmanufacturing the first substrate; and bonding the first substrate to asecond substrate, wherein a spacer is formed between the first substrateand the second substrate to connect and fix the first substrate and thesecond substrate, so as to form a sample storing space that is sealableand allows a light to pass through between the first substrate and thesecond substrate, and the removable light shielding componentcorresponds to the sample storing space to shield at least a portion ofthe light that passes through the sample storing space.
 22. Themanufacturing method according to claim 21, wherein the removable lightshielding component comprises a structural member that is manufacturedsimultaneously with the first substrate, and the structural member isconnected with the first substrate by a connection part.
 23. Themanufacturing method according to claim 21, further comprising forming arecess on a first surface of the first substrate corresponding to thesample storing space for forming an observation window that exposes thesample storing space, wherein the removable light shielding componentcomprises a material layer that is located on a bottom surface of theobservation window and extends to a portion of a junction between thesample storing space and the first substrate.